XRR metrology for advanced interconnect material process characterization

Daniele Contestable-Gilkes, Sailesh M. Merchant, Minseok Oh, Doug E. Jones, Richard B. Irwin, Brenda Prenitzer, William C. Johnson, Jingmin Leng, Eileen Clifford

Research output: Contribution to journal › Conference article › peer-review

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Keyphrases

Material Science

Engineering

Physics