Micromachined two dimensional lens scanner with large aperture beam

Hyeon Cheol Park; Cheol Song; Ki Hun Jeong

doi:10.1109/OMEMS.2010.5672168

Micromachined two dimensional lens scanner with large aperture beam

Hyeon Cheol Park, Cheol Song, Ki Hun Jeong

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and yscanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.

Original language	English (US)
Title of host publication	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Pages	91-92
Number of pages	2
DOIs	https://doi.org/10.1109/OMEMS.2010.5672168
State	Published - 2010
Externally published	Yes
Event	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, Japan Duration: Aug 9 2010 → Aug 12 2010

Publication series

Name	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

Conference

Conference	2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Country/Territory	Japan
City	Sapporo
Period	8/9/10 → 8/12/10

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/OMEMS.2010.5672168

Cite this

Park, H. C., Song, C., & Jeong, K. H. (2010). Micromachined two dimensional lens scanner with large aperture beam. In 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 (pp. 91-92). Article 5672168 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010). https://doi.org/10.1109/OMEMS.2010.5672168

Micromachined two dimensional lens scanner with large aperture beam. / Park, Hyeon Cheol; Song, Cheol; Jeong, Ki Hun.
2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010. 2010. p. 91-92 5672168 (2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Park, HC, Song, C & Jeong, KH 2010, Micromachined two dimensional lens scanner with large aperture beam. in 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010., 5672168, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, pp. 91-92, 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010, Sapporo, Japan, 8/9/10. https://doi.org/10.1109/OMEMS.2010.5672168

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abstract = "This work present a novel approach for miniaturized optical scanning using the two-axis MEMS lens scanning system with large beam diameter of 0.6mm. A millimeter aspheric glass lenses are integrated on electrostatic MEMS actuators to fold optical path. By integrating optical components perpendicularly on MEMS actuators, more compact device size along the optical axis is accomplished within 2mm. The scanning angle of 4.6° and 5.3° at the scanning speed of 276.5Hz and 294.4Hz for x-scanning and yscanning respectively are achieved, when actuated by only DC 5V and AC peak to peak 10V biased resonance excitation.",

author = "Park, {Hyeon Cheol} and Cheol Song and Jeong, {Ki Hun}",

note = "Copyright: Copyright 2011 Elsevier B.V., All rights reserved.; 2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 ; Conference date: 09-08-2010 Through 12-08-2010",

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Micromachined two dimensional lens scanner with large aperture beam

Abstract

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