Micromachined lens microstages for two-dimensional forward optical scanning

Hyeon Cheol Park, Cheol Song, Ki Hun Jeong

Research output: Contribution to journalArticlepeer-review

17 Scopus citations


This work presents a novel approach for a miniaturized optical scanning module based on lateral and piston motion of two commercial lenses by MEMS actuation. Two aspheric glass lenses of 1 mm diameter are assembled on two electrostatically actuated microstages moving along perpendicular axes to tilt optical path. The compact integration secures the effective beam aperture of 0.6 mm within the device width of 2 mm. The lens mass provides high-Q motions at low operating voltages of DC 5 V and AC 10 Vpp, i.e., the lateral angle of ± 4.6° at 277 Hz and the vertical angle of ± 5.3° at 204 Hz. The device can provide a new direction for miniaturizing laser scanning based endoscopes or handheld projectors.

Original languageEnglish (US)
Pages (from-to)16133-16138
Number of pages6
JournalOptics Express
Issue number15
StatePublished - Jul 19 2010
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics


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