Integrated microactuation scanning probe microscopy system

Engineering & Materials Science

• Scanning probe microscopy 100%
• Scanning 47%
• Dry etching 30%
• Wet etching 28%
• Microfabrication 26%
• Electrostatics 22%
• MEMS 19%
• Capacitors 16%
• Detectors 16%
• Sensors 10%

Physics & Astronomy

• microscopy 43%
• scanning 38%
• probes 37%
• actuation 13%
• microelectromechanical systems 12%
• scanners 11%
• capacitors 10%
• assembly 10%
• alignment 9%
• electrostatics 9%
• etching 9%
• sensors 7%
• detectors 6%

Chemical Compounds

• Scanning Probe Microscopy 76%
• Capacitor 21%
• Etching 18%
• Displacement 16%