A touch sensor with high spatial resolution and capability for force measurement is described. The touch sensor incorporates an acoustic detector having an array of transducers integrated with an underlying silicon layer. An ac voltage is applied between the silicon layer and an upper metallic layer. This device is useful as a touch and force pattern sensor for mechanical actuators, such as robot arms, etc.
|Number of pages
|IBM technical disclosure bulletin
|Published - Jan 1 1983
ASJC Scopus subject areas
- General Engineering