Abstract
We describe a TEM specimen holder which has been designed and constructed in order to observe the process of electrochemical pore formation in silicon. The holder incorporates electrical feedthroughs and a sealed reservoir for the electrolyte and it accepts lithographically patterned silicon specimens. We present ex situ observations of progressive pore propagation and show dynamic, in situ observations of electrolyte movement within the pores.
| Original language | English (US) |
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| Pages | 69-74 |
| Number of pages | 6 |
| State | Published - 1996 |
| Externally published | Yes |
| Event | Proceedings of the 1995 MRS Fall Meeting - Boston, MA, USA Duration: Nov 26 1995 → Dec 1 1995 |
Conference
| Conference | Proceedings of the 1995 MRS Fall Meeting |
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| City | Boston, MA, USA |
| Period | 11/26/95 → 12/1/95 |
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering