Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

Deok Ho Kim; Byungkyu Kim; Jong Oh Park

doi:10.1007/BF02990297

Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

Deok Ho Kim
, Byungkyu Kim
, Jong Oh Park

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

Original language	English (US)
Pages (from-to)	789-797
Number of pages	9
Journal	KSME International Journal
Volume	18
Issue number	5
DOIs	https://doi.org/10.1007/BF02990297
State	Published - May 2004
Externally published	Yes

Keywords

Atomic Force Microscope (AFM)
Micro Force Sensing
Micro/Nano-manipulation
Microrobotics
Piezoresistive MEMS Cantilever
Van der Waals Force

ASJC Scopus subject areas

Mechanical Engineering

Access to Document

10.1007/BF02990297

Cite this

@article{70e87960405c4a658cbd50add0fcede9,

title = "Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications",

abstract = "The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.",

keywords = "Atomic Force Microscope (AFM), Micro Force Sensing, Micro/Nano-manipulation, Microrobotics, Piezoresistive MEMS Cantilever, Van der Waals Force",

author = "Kim, \{Deok Ho\} and Byungkyu Kim and Park, \{Jong Oh\}",

note = "Funding Information: The authorsw ould like to thank Dr. Jaewan Hong (Seoul National University)f or his help in calibratingse nsora nd for many valuabled is-cussionsT. his researchu, ndert he contractp ro-ject code MS-02-324-01h,a s beens upportedb y the IntelligenMt icrosystemC enter( IMC : http:// www.microsystem.re.kwrh),i ch carries out one of the 21st century'sF rontierR \& D Projects sponsoredb y the Korea Ministry of Science\& Technology.",

year = "2004",

month = may,

doi = "10.1007/BF02990297",

language = "English (US)",

volume = "18",

pages = "789--797",

journal = "KSME International Journal",

issn = "1226-4865",

publisher = "Korean Society of Mechanical Engineers",

number = "5",

}

TY - JOUR

T1 - Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

AU - Kim, Deok Ho

AU - Kim, Byungkyu

AU - Park, Jong Oh

N1 - Funding Information: The authorsw ould like to thank Dr. Jaewan Hong (Seoul National University)f or his help in calibratingse nsora nd for many valuabled is-cussionsT. his researchu, ndert he contractp ro-ject code MS-02-324-01h,a s beens upportedb y the IntelligenMt icrosystemC enter( IMC : http:// www.microsystem.re.kwrh),i ch carries out one of the 21st century'sF rontierR & D Projects sponsoredb y the Korea Ministry of Science& Technology.

PY - 2004/5

Y1 - 2004/5

N2 - The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

AB - The nanoscale sensing and manipulation have become a challenging issue in micro/nano-robotic applications. In particular, a feedback sensor-based manipulation is necessary for realizing an efficient and reliable handling of particles under uncertain environment in a micro/ nano scale. This paper presents a piezoresistive MEMS cantilever for nanoscale force measurement in microrobotics. A piezoresistive MEMS cantilever enables sensing of gripping and contact forces in nanonewton resolution by measuring changes in the stress-induced electrical resistances. The calibration of a piezoresistive MEMS cantilever is experimentally carried out. In addition, as part of the work on nanomanipulation with a piezoresistive MEMS cantilever, the analysis on the interaction forces between a tip and a material, and the associated manipulation strategies are investigated. Experiments and simulations show that a piezoresistive MEMS cantilever integrated into a microrobotic system can be effectively used in nanoscale force measurements and a sensor-based manipulation.

KW - Atomic Force Microscope (AFM)

KW - Micro Force Sensing

KW - Micro/Nano-manipulation

KW - Microrobotics

KW - Piezoresistive MEMS Cantilever

KW - Van der Waals Force

UR - https://www.scopus.com/pages/publications/10044268742

UR - https://www.scopus.com/pages/publications/10044268742#tab=citedBy

U2 - 10.1007/BF02990297

DO - 10.1007/BF02990297

M3 - Article

AN - SCOPUS:10044268742

SN - 1226-4865

VL - 18

SP - 789

EP - 797

JO - KSME International Journal

JF - KSME International Journal

IS - 5

ER -

Implementation of a Piezoresistive MEMS Cantilever for Nanoscale Force Measurement in Micro/Nano Robotic Applications

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this