Electrothermal MEMS fiber scanner for optical endomicroscopy

Yeong Hyeon Seo; Kyungmin Hwang; Hyeon Cheol Park; Ki Hun Jeong

doi:10.1364/OE.24.003903

Electrothermal MEMS fiber scanner for optical endomicroscopy

Yeong Hyeon Seo
, Kyungmin Hwang
, Hyeon Cheol Park
, Ki Hun Jeong

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

We report a novel MEMS fiber scanner with an electrothermal silicon microactuator and a directly mounted optical fiber. The microactuator comprises double hot arm and cold arm structures with a linking bridge and an optical fiber is aligned along a silicon fiber groove. The unique feature induces separation of resonant scanning frequencies of a single optical fiber in lateral and vertical directions, which realizes Lissajous scanning during the resonant motion. The footprint dimension of microactuator is 1.28 x 7 x 0.44 mm³. The resonant scanning frequencies of a 20 mm long optical fiber are 239.4 Hz and 218.4 Hz in lateral and vertical directions, respectively. The full scanned area indicates 451 μm x 558 μm under a 16 V_pp pulse train. This novel laser scanner can provide many opportunities for laser scanning endomicroscopic applications.

Original language	English (US)
Pages (from-to)	3903-3909
Number of pages	7
Journal	Optics Express
Volume	24
Issue number	4
DOIs	https://doi.org/10.1364/OE.24.003903
State	Published - Feb 22 2016
Externally published	Yes

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1364/OE.24.003903

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title = "Electrothermal MEMS fiber scanner for optical endomicroscopy",

abstract = "We report a novel MEMS fiber scanner with an electrothermal silicon microactuator and a directly mounted optical fiber. The microactuator comprises double hot arm and cold arm structures with a linking bridge and an optical fiber is aligned along a silicon fiber groove. The unique feature induces separation of resonant scanning frequencies of a single optical fiber in lateral and vertical directions, which realizes Lissajous scanning during the resonant motion. The footprint dimension of microactuator is 1.28 x 7 x 0.44 mm3. The resonant scanning frequencies of a 20 mm long optical fiber are 239.4 Hz and 218.4 Hz in lateral and vertical directions, respectively. The full scanned area indicates 451 μm x 558 μm under a 16 Vpp pulse train. This novel laser scanner can provide many opportunities for laser scanning endomicroscopic applications.",

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doi = "10.1364/OE.24.003903",

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T1 - Electrothermal MEMS fiber scanner for optical endomicroscopy

AU - Seo, Yeong Hyeon

AU - Hwang, Kyungmin

AU - Park, Hyeon Cheol

AU - Jeong, Ki Hun

PY - 2016/2/22

Y1 - 2016/2/22

N2 - We report a novel MEMS fiber scanner with an electrothermal silicon microactuator and a directly mounted optical fiber. The microactuator comprises double hot arm and cold arm structures with a linking bridge and an optical fiber is aligned along a silicon fiber groove. The unique feature induces separation of resonant scanning frequencies of a single optical fiber in lateral and vertical directions, which realizes Lissajous scanning during the resonant motion. The footprint dimension of microactuator is 1.28 x 7 x 0.44 mm3. The resonant scanning frequencies of a 20 mm long optical fiber are 239.4 Hz and 218.4 Hz in lateral and vertical directions, respectively. The full scanned area indicates 451 μm x 558 μm under a 16 Vpp pulse train. This novel laser scanner can provide many opportunities for laser scanning endomicroscopic applications.

AB - We report a novel MEMS fiber scanner with an electrothermal silicon microactuator and a directly mounted optical fiber. The microactuator comprises double hot arm and cold arm structures with a linking bridge and an optical fiber is aligned along a silicon fiber groove. The unique feature induces separation of resonant scanning frequencies of a single optical fiber in lateral and vertical directions, which realizes Lissajous scanning during the resonant motion. The footprint dimension of microactuator is 1.28 x 7 x 0.44 mm3. The resonant scanning frequencies of a 20 mm long optical fiber are 239.4 Hz and 218.4 Hz in lateral and vertical directions, respectively. The full scanned area indicates 451 μm x 558 μm under a 16 Vpp pulse train. This novel laser scanner can provide many opportunities for laser scanning endomicroscopic applications.

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Electrothermal MEMS fiber scanner for optical endomicroscopy

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