A non-resonant fiber scanner based on an electrothermally-actuated MEMS stage

Xiaoyang Zhang, Can Duan, Lin Liu, Xingde Li, Huikai Xie

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


Abstract Scanning fiber tips provides the most convenient way for forward-viewing fiber-optic microendoscopy. In this paper, a distal fiber scanning method based on a large-displacement MEMS actuator is presented. A single-mode fiber is glued on the micro-platform of an electrothermal MEMS stage to realize large range non-resonant scanning. The micro-platform has a large piston scan range of up to 800 μm at only 6 V. The tip deflection of the fiber can be further amplified by placing the MEMS stage at a proper location along the fiber. A quasi-static model of the fiber-MEMS assembly has been developed and validated experimentally. The frequency response has also been studied and measured. A fiber tip deflection of up to 1650 μm for the 45 mm-long movable fiber portion has been achieved when the MEMS electrothermal stage was placed 25 mm away from the free end. The electrothermally-actuated MEMS stage shows a great potential for forward viewing fiber scanning and optical applications.

Original languageEnglish (US)
Article number9232
Pages (from-to)239-245
Number of pages7
JournalSensors and Actuators, A: Physical
StatePublished - Aug 3 2015


  • Distal fiber scanning
  • Electrothermal actuation
  • Fiber scanner
  • Large range
  • MEMS stage
  • Micro-platform
  • Microactuator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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