Abstract
This article presents a fully integrated multi-modal CMOS cellular sensor/stimulator array chip with 21 952 pixels and 1568-pixel concurrent readouts, while each array pixel can be independently reconfigured to support three sensing and one stimulation modalities: cellular potential recording, optical-point impedance sensing, and bi-phasic current stimulation. The CMOS sensor/stimulator array chip provides 3.6 mm × 1.6 mm active field-of-view (FoV). Each pixel contains one 8 μm × 8 μm gold deposited electrode, one 6 μm × 6 μm photodiode, and in-pixel circuits within 8 μm × 11 μm pixel area, while the pixel-to-pixel pitch is 16 μm × 16 μm. As a proof of concept, the CMOS array is implemented in a standard 130-nm BiCMOS process. Comprehensive electrical testing (potential/optical/four-point impedance/stimulation) and biological measurements (potential/optical/four-point impedance) with on-chip rat cardiomyocytes demonstrate the functionalities and unique advantages of this multi-modality cellular array. With high throughput multi-modal cellular sensing supported at the pixel level, this array chip enables holistic characterization of on-chip cellular samples with single-cell resolution.
Original language | English (US) |
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Article number | 9466365 |
Pages (from-to) | 2438-2451 |
Number of pages | 14 |
Journal | IEEE Journal of Solid-State Circuits |
Volume | 56 |
Issue number | 8 |
DOIs | |
State | Published - Aug 2021 |
Externally published | Yes |
Keywords
- Biosensor
- cardiomyocytes
- cell-based assay
- cellular recording
- digital pathology
- drug screening
- high resolution
- high throughput
- impedance sensing
- multi-modality
- optical detection
- personalized medicine
- point-of-care (PoC) devices
- stimulation
ASJC Scopus subject areas
- Electrical and Electronic Engineering