Research output per year
Research output per year
Search results
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2001
Eliminating process-related defects during the fabrication of copper interconnects
Oh, M., Ramappa, D. A., Contestable-Gilkes, D., Merchant, S. M., Jones, D. E., Subramanian, K., Lytle, S., Oladeji, I., Seet, C. S. & Li, H. M., Dec 1 2001, In: Advanced Metallization Conference (AMC). p. 85-89 5 p.Research output: Contribution to journal › Conference article › peer-review
2 Scopus citations -
XRR metrology for advanced interconnect material process characterization
Contestable-Gilkes, D., Merchant, S. M., Oh, M., Jones, D. E., Irwin, R. B., Prenitzer, B., Johnson, W. C., Leng, J. & Clifford, E., 2001, In: Advanced Metallization Conference (AMC). p. 573-579 7 p.Research output: Contribution to journal › Conference article › peer-review